GENERAL DESCRIPTION
The ADXRS623 is a complete angular rate sensor (gyroscope)
that uses the Analog Devices, Inc., surface-micromachining
process to create a functionally complete and low cost angular
rate sensor integrated with all required electronics on one chip.
The manufacturing technique for this device is the same high
volume BiMOS process used for high reliability automotive
airbag accelerometers.
The output signal, RATEOUT (1B, 2A), is a voltage proportional
to the angular rate about the axis that is normal to the top surface
of the package. The output is ratiometric with respect to a provided
reference supply. An external capacitor sets the bandwidth.
Other external capacitors are required for operation.
A temperature output is provided for compensation techniques.
Two digital self-test inputs electromechanically excite the sensor to
test proper operation of both the sensor and the signal conditioning
circuits. The ADXRS623 is available in a 7 mm × 7 mm × 3 mm
ceramic ball grid array (CBGA) package.

FEATURES
Complete rate gyroscope on a single chip
Z-axis (yaw rate) response
High vibration rejection over wide frequency
2000 g powered shock survivability
Ratiometric to referenced supply
5 V single-supply operation
–40°C to +105°C operation
Self-test on digital command
Ultrasmall and light (<0.15 cc, <0.5 gram)
Temperature sensor output
RoHS compliant
Qualified for automotive applications

APPLICATIONS
Inertial measurement units
Platform stabilization
Robotics